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University of Illinois Chicago
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University of Illinois Chicago

Electrical and Computer Engineering

College of Engineering

Photo of Feinerman, Alan

Alan Feinerman

Associate Professor Emeritus

Department of Electrical and Computer Engineering

Contact

Building & Room:

3019 ERF

Address:

842 West Taylor Street, MC 154, Chicago, IL 60607

Office Phone:

(312) 996-2313

Email:

feinerma@uic.edu

About

Professional Achievements

Director of Nanotechnology Core Facility,  8/98 to 8/95.

Editor: Chicago Area MEMS/Nano Announcements since 1/00 to 8/95.

2011 UIC Inventor of the Year

Research Interests

Current research is adapting and developing unique MEMS MicroElectroMechanical structures to solve various technological problems. These include implantable drift-free pressure sensors, microfluidic components and systems, vacuum insulation panels, and continuous casting of thin wires and foils.

Selected Publications

Contributing Author

  1. A.D. Feinerman and D.A. Crewe, “3D Fabrication of Miniature Electron Optics,” invited chapter in Advances in Imaging and Electron Physics: Electron Microscopy and Holography, Editor P.W. Hawkes, vol. 121, pp.91-142, 2002.
  2. A.D. Feinerman and D.A. Crewe, “Miniature Electron Optics,” invited chapter in Advances in Imaging and Electron Physics, Editor P.W. Hawkes, vol. 102, pp.187-234, 1998.
  3. III. Refereed Journals
  4. R. Kuljic, J. Chang, N. Jayapratha, T. Dankovic, K. Banerjee, A. Feinerman, and H. Busta, “A MEMS-based Vacuum Gauge for Measuring Pressure and Out-gassing Rates in Miniaturized Vacuum Microelectronic Devices,” J. Vac. Sci. Technol. B 29, 02B114 (2011); doi:10.1116/1.3562271 (5 pages)
  5. Michael Davis and Alan Feinerman, “Assessing Graduate Student Progress in Engineering Ethics,” Science and Engineering Ethics, DOI: 10.1007/s11948-010-9250-2, 11/21/2010.
  6. N. Paya, Tatjana Dankovic, and A. Feinerman, “A Microfluidic Mixer Fabricated From Compliant Thermoplastic Films,” Journal of Undergraduate Research 2, pp. 1-5 (2008).http://jur.phy.uic.edu/issue2/JUR-REU0801005.pdf
  7. W. Xu, K. Sur, H. Zeng, A. Feinerman, D. Kelso, and J.B. Ketterson, “A microfluidic approach to assembling ordered microsphere arrays,” J. Micromech. Vol. 18, No. 7, 2008, 075027.
  8. V. Sood, and A. Feinerman, “Design and Development of High Performance Vacuum Insulation Panels (VIP) with Kevlar Thread Support,” Journal of Undergraduate Research at the University of Illinois at Chicago, Vol. 1, No. 1, pp. 41-46, 2007. http://jur.phy.uic.edu/JUR-REU-41-46.pdf
  9. H. Busta, K. Tao, and A. Feinerman, “Evidence of electronic cooling from resonance states of nanocrystalline graphite (NCG) field emitters,” JVST B, Vol. 26, No. 2, pp. 720-723, 2008. Reprinted in Virtual Journal of Nanoscale Science & Technology, Vol. 17, Issue 15, 2008, www.vjnano.org.
  10. Z. Wan, H. Zeng, and A. Feinerman “Reversible Electrowetting of Liquid-Metal Droplet,” J. Fluids Engineering, Vol. 129, No. 4, pp. 388-394, 2007.
  11. A. Mello, Z. Hong, A. M. Rossi, L Luan, M. Farina, W. Querido, J. Eon, J. Terra, G. Balasundaram, T. Webster, A. Feinerman, D. E. Ellis, J. B. Ketterson, C. L. Ferreira, “Osteoblast proliferation on hydroxyapatite thin coatings produced by right angle magnetron sputtering,” Biomedical Materials 2, pp. 67-77, 2007.
  12. H. Zeng, Z. Wan, and A.D. Feinerman, “Tilting Micromirror With a Liquid-Metal Pivot,” J. Microelectromechanical Systems, Vol. 15, No. 6, pp. 1568-1575, 2006.
  13. Z. Wan, H. Zeng, and A. Feinerman “An area-tunable micromirror based on electrowetting actuation of liquid-metal droplets,” Applied Physics Letters, Vol. 89, 201107, 2006. Reprinted in Virtual Journal of Nanoscale Science & Technology, November 27, 2006, Vol. 14, Issue 22, http://www.vjnano.org.
  14. H. Zeng, Z. Wan, and A.D. Feinerman, “Fabrication of Micro/Nano Fluidic Channels with Sacrificial Galvanic Coupled Metals,” Nanotechnology, Vol. 17 pp. 3183-3188, 2006.
  15. H. Zeng, A.D. Feinerman, Z. Wan, and P. Patel, “ Piston motion micromirror based on electrowetting of liquid metals,” J. Microelectromechanical Systems, Vol. 14, No. 2, pp. 285-294, 2005.
  16. H. Busta, S. Lesiak, B. Zwicker, A.D. Feinerman, J. Montgomery, and Z. Wan, “X-Ray Generation From Large Area Carbon-Based Field Emitters,” JVST B, Vol. 23, No. 2, pp. 814-818, 2005.
  17. H. Busta, Z. Tolt, J. Montgomery, and A.D. Feinerman, “Field Emission from Teepee-shaped Carbon Nanotube Bundles,” JVST B, Vol. 23, No. 2, pp. 676-679, 2005.
  18. Z. Wan, A.D. Feinerman, H. Zeng, and G. Friedman “Electrocapillary Piston Motion and a Prototype of Phase Manipulating Micromirror,” J. Microelectromechanical Systems, Vol. 13, No. 4, pp. 620-627, 2004.
  19. H. Busta, D. Boldridge, R. Myers, G. Snider, E. Edwards, and A.D. Feinerman, “Electron emission from carbon black-based field emitters including diesel exhaust,” JVST B, Vol. 22, No. 3, pp.1261-1265, 2004.
  20. H. Busta, D. Boldridge, R. Myers, E. Edwards, and A.D. Feinerman, “Field emission from carbon black and carbon black and silica nanoparticles dispersed in photoresist,” Applied Physics Letters, Vol. 83, No. 9, pp. 1779-1781, 2003.
  21. B. Yellen, G. Friedman, A.D. Feinerman, “Patterning of Super-Paramagentic Colloidal Particles”, J. Appl. Phys. Vol. 93, No. 10, pp.7331-7333, 2003.
  22. B. Yellen, G. Friedman, A.D. Feinerman, “Analysis of interactions for magnetic particles assembling on magnetic templates”, J. Appl. Phys., Vol. 91, No. 10, pp. 8552-8554, 2002.
  23. J.J. Song, S. Baikar, F. Decarlo, Y.W. Kang, R.L. Kustom, D.C. Mancini, B. Lai, A.D. Feinerman, and V. White, “LIGA fabricated compact mm-wave linear accelerator cavities,” Microsystem Technologies, Vol. 4, No. 4, pp. 193-196, 1998.
  24. D.A. Crewe, M.M. Ruffin, and A.D. Feinerman, “Initial Tests of a Micromachined SEM,” J. Vac. Sci. & Technol. B, Vol 14, No. 6, pp. 3808-3812, 1996.
  25. J.J. Song, H. Henke, A.D. Feinerman, G.M. Wells, V. White, Y.W. Kang, R.L. Kustom, B. Lai, F.E. Mills, and A. Nassiri, “Fabrication of mm-wave undulator cavities,” Rev. Sci. Instrum., Vol. 67, No. 9, p. 3348, 1996.
  26. A.D. Feinerman, R. Lajos, V. White, and D. Denton, “X-ray Lathe: an x-ray lithographic exposure tool for non-planar objects,” J. Microelectromechanical Systems, Vol. 5, No. 4, pp. 250-255, 1996.
  27. T.L. Willke, and A.D. Feinerman, “Deep-Etch Silicon MM-Waveguide Structure for the Relativistic Acceleration of Electrons,” J. Vac. Sci. Technol. B Vol. 14, No. 4, pp. 2524-2530, 1996.
  28. P.J. Matthews, T. Berenc, F. Schoenfeld, R.L. Kustom, and A.D. Feinerman, “Electromagnetic Field Measurements on a mm-wave Linear Accelerator,” IEEE Trans. Microwave Theory Tech. Vol. 44, No. 8, pp. 1401-1409, 1996.
  29. L.R. Turner, A. Nassiri, F.E. Mills, S. Kim, and A.D. Feinerman, “A Micro-Undulator Fabricated by LIGA Processes,” IEEE Trans. Magn., Vol. 32, No. 4, pp. 2602-2604, 1996.
  30. A.D. Feinerman, and S.R. Thodati, “Millimeter-scale Actuator with Fiberoptic Roller Bearings,” J. Microelectromechanical Systems, Vol. 4, No. 1, pp. 28-33, 1995.
  31. A.D. Feinerman, D.A. Crewe, and A.V. Crewe, “Microfabrication of Arrays of Scanning Electron Microscopes,” J. Vac. Sci. Technol. B, Vol. 12, No. 6, pp. 3182-3186, 1994.
  32. S.E. Shoaf, and A.D. Feinerman, “Aligned Au-Si Eutectic Bonding of Silicon Structures,” J. Vac. Sci. Technol. A, Vol. 12, No. 1, pp. 19-22, 1994.
  33. D.A. Crewe, D.C. Perng, S.E. Shoaf, and A.D. Feinerman, “A Micromachined Electrostatic Electron Source,” J. Vac. Sci. Technol. B, Vol. 10, No. 6, pp. 2754-2758, 1992.
  34. A.D. Feinerman, D.A. Crewe, D.C. Perng, S.E. Shoaf, and A.V. Crewe, “Sub-cm Electron Microscope,” J. Vac. Sci. Technol. A, Vol. 10, No. 4, pp. 611-616, 1992.
  35. D.C. Perng, D.A. Crewe, and A.D. Feinerman, “Micromachined Thermionic Emitters,” J. Micromechanics and Microengineering, Vol. 2, No. 1 pp. 25-30, 1992.
  36. A.D. Feinerman, “Factors Affecting the Encroachment of Tungsten into the Si/SiO 2 Interface During the Reduction of Tungsten Hexafluoride by Silicon,” J. Electrochem. Soc., Vol. 137, pp. 3683-3687, 1990.
  37. J.G. Black, D.J. Ehrlich, J.H.C. Sedlacek, A.D. Feinerman and H.H. Busta, “Rapid Low­Resistance Interconnects by Selective Tungsten Deposition on Laser-Direct-Written Polysilicon,” IEEE Electron Device Lett. 7, Vol. EDL-7, No. 7, pp. 422-424, 1986.
  38. H.H. Busta, J.B. Ketterson, A.D. Feinerman and G.K. Wong, “Formation of Ultrathin Tungsten Filaments via Selective Low-Pressure Chemical Vapor Deposition,” J. Appl. Phys. Vol. 58, No. 2, pp. 987-989, 1985.

Conference Papers

  1. A. Feinerman, T. Dankovic, and D. Yarbrough, “Thermal model of area and edge losses for vacuum insulation panels using tensile supports and a stainless steel foil exterior,” Proceedings of the 31th International Thermal Conductivity Conference and the 19th International Thermal Expansion Symposium, Saguenay, Quebec, June 26-30, 2011.
  2. J. Chang, N. Jayapratha, R. Kuljic, B. Salvador, M. Cantwell, K. Broughton, B. Kunzer, P. K. Ng, A. Selner, R. Razo, M. Harris, Q. He, S. Syerov, D. Harry, S. C. Kanneganti, A. Benison, B. Edlavitch, T. Dankovic, K. Banerjee, A. Feinerman, and H. Busta, “A MEMS-based Vacuum Gauge for Measuring Pressure and Out-gassing Rates in Miniaturized Vacuum Microelectronic Devices,” Technical Digest of the 23rd International Vacuum Nanoelectronics Conference, Palo Alto, CA, USA, 2010
  3. T. Dankovic, and A. Feinerman, “Compliant Micromixer,” 2010 ASME International Mechanical Engineering Congress, Nov 12-18, 2010, Vancouver, British Columbia, Canada IMECE2010-38991
  4. W. Mu, Z. Li, L. Luan, P. West, H. Kyriazes, G. Wang, A. Feinerman, and J.B. Ketterson “Force Measurement and Optically Assisted Particle Separation in an Optical Standing Wave,” Proceedings SPIE 6644, 66440R, 2007.
  5. H.H. Busta, J. Montgomery, B. Schwandt, and A. Feinerman, “X-ray generation from miniaturized vacuum tubes with diameters ranging from 1 to 5mm,” Technical Digest of the 18th International Vacuum Nanoelectronics Conference, St. Catherine’s College, Oxford, UK, 78, 2005.
  6. Z. Wan, H. Zeng, and A. Feinerman, “Reversible Electrowetting of Liquid-Metal Droplet,” Proceedings of 2005 ASME International Mechanical Engineering Congress, Nov 5-11, 2005, Orlando, FL, No. IMECE2005-81007
  7. H. Zeng, A. Feinerman, and Z. Wan, “A Sacrificial Method for Fabricating Micro/Nano channel using galvanic corrosion,” Proceedings of 2005 ASME International Mechanical Engineering Congress, Nov 5-11, 2005, Orlando, FL, No. IMECE2005-81124
  8. H. Busta, S. Lesiak, J. Montgomery, and A. Feinerman “Carbon-based nanoemitters for large scale x-ray sterilization applications,” 2005 Sensors Expo and Conference, Chicago, IL, 2005.
  9. H. Busta, Z. Tolt, J. Montgomery, and A. Feinerman, “Field Emission from Teepee-shaped Carbon Nanotube Bundles,” Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IVNC), pp. 30 – 31, 11-16 July 2004.
  10. H. Zeng, A.D. Feinerman, and Z. Wan, “A Compact, Easily Assembled Micromirror with Liquid Metal Pivot”, Proceedings of 2003 ASME International Mechanical Engineering Congress, Nov 15-21, 2003, Washington, D.C., No ASME2003-41528
  11. Z. Wan, A.D. Feinerman, G. Friedman, and H. Zeng, “Electrocapillary piston motion and a prototype of phase-manipulating micromirror,” Proceedings of IMECE’03: 2003 ASME International Mechanical Engineering Congress, Washington, D.C., No: IMECE2003-41288, 2003.
  12. X. Chen, R. Ruoff, H. Busta, E. Edwards, and A. Feinerman, “Field emission from graphite platelet nanofibers (GPNs),” Technical Digest of the 16th International Vacuum Microelectronics Conference (IVMC), pp. 215 – 216 , 7-11 July 2003.
  13. E. Edwards, H. Busta, and A. Feinerman, “Visualization of the temperature distribution of carbon nanotube field emitters using thermochromic liquid crystal sheets,” Technical Digest of the 16th International Vacuum Microelectronics Conference (IVMC), pp. 211 – 212, 7-11 July 2003.
  14. H. Busta, C. Partee, S. Joray, T. Lang, E. Edwards, and A. Feinerman, ” Field emission from a polymeric precursor to diamond-like carbon (DLC), Technical Digest of the 16th International Vacuum Microelectronics Conference (IVMC), pp. 175 – 176 , 7-11 July 2003.
  15. B.B. Yellen, G. Friedman, and A.D. Feinerman, “Magnetically driven assembly of superparamagnetic colloidal particles,” Proceedings of SPIE, Vol. 4982, p. 302, 2003.
  16. A.D. Feinerman, G. Friedman, E. Kasman, J. Montgomery, P. Patel, C.M. Megaridis, E. Howell, “Agile Micro-Mirrors with Three Degrees of Freedom Manufactured with Liquid MEMS Technology,” in Free-Space Laser Communication and Laser Imaging, David G. Voelz, Jennifer C. Ricklin, Editors, Proceedings of SPIE, Vol. 4489, 166-176, 2002.
  17. B. Gimi, S.C. Grant, R.L. Magin, A.D. Feinerman, E. Frolova, G. Friedman, “SNR Improvements for RF Microcoils”, 41 st Experimental NMR Conference, April 9, 2000
  18. D.A. Crewe, M.M. Ruffin, and A.D. Feinerman, “Focusing Properties of a Micromachined Electron Lens,” Proceeding of SPIE, Vol 3009, p. 102, 1997.
  19. Y.W. Kang, A.D. Feinerman, R.L. Kustom, A. Nassiri, and J.J. Song, “Design and Construction of Planar mm-Wave Accelerating Cavity Structures,” Synchrotron Radiation Instrumentation ’95; Argonne National Laboratory; Argonne, IL October 17-18, 1995, in CD in Rev. Sci. Instrum., Vol. 67, No. 9, 1996.
  20. A.D. Feinerman, “Precision Fabrication of Analytical Instruments,” ASPE Conference, Tucson, Arizona, April, 1995.
  21. R.L. Kustom, A.D. Feinerman, D. Grudzien, H. Henke, D. Horan, Y.W. Kang, A.M. Khounsary, P.J. Matthews, F.E. Mills, A. Nassiri, J. Song, and T.L. Willke, “Microcavity Structures,” Proc. of Linac 94 Conference, KEK, Tsukuba, Japan, August 1994.
  22. P. Matthews, Y. Kang, T. Berenc, T. Willke, A.D. Feinerman, and R. Kustom, “Electromagnetic Field Measurements on a mm-wave Linear Accelerator,” Proceedings of the Fourth European Particle Accelerator Conference, pp. 1303-1305, London, England, June 27 to July 1, 1994.
  23. A.D. Feinerman, D.A. Crewe, D.C. Perng, C.A. Spindt, P.R. Schwoebel, and A.V. Crewe, “Miniature electron microscopes for lithography,” Proc. of SPIE – Microlithography ’94, Vol. 2194, pp. 262-273, 1994.
  24. A. Nassiri, R.L. Kustom, F.E. Mills, Y.W. Kang, A.D, Feinerman, H. Henke, P. Matthews, J. Song, D. Grudzien, D. Horan, and T. Willke, “A 50 MeV mm-Wave Electron Linear Accelerator System for Production of Tunable Short Wavelength Synchrotron Radiation”, IEEE, International Electron Device Meeting Digest, pp. 169-172, December 6, 1993.
  25. D.C. Perng, D.A. Crewe, S.B. Lee, and A.D. Feinerman, “Micromachined Thermionic Emitter,” Proc. of SPIE – Imaging Technologies and Applications, Vol. 1778, pp. 90-98, 1992.
  26. A.D. Feinerman, D.A. Crewe, D.C. Perng, and S.E. Shoaf, and A.V. Crewe, “High Throughput Electron Beam Lithography,” Proc. of SPIE – Imaging Technologies and Applications, Vol. 1778, pp. 78-89, 1992.
  27. D.A. Crewe, D.C. Perng, S.E. Shoaf, and A.D. Feinerman, “A Micromachined Electron Source,” SPIE – Imaging Technologies and Applications, Vol. 1778, pp. 66-77, March 1992.
  28. A.D. Feinerman, S.E. Shoaf, and D.A. Crewe, “Precision Aligning and Bonding of Silicon Die,” Patterning Science and Technology II/Interconnection and Contact Metallization for ULSI, PV92-6 pp. 115-125, edited by W. Greene, G.J. Hefferon, L.K. White, T.L. Herndon, and A.L. Wu, Electrochemical Society Proceedings.
  29. H.H. Busta, A.D. Feinerman, J.B. Ketterson, and R.D. Cuellar, “Strings, Loops and Pyramids – Building Blocks for Microstructures,” Proceedings of the IEEE Micro Robots and Teleoperators Workshop, Hyannis, MA, November 1987. Reprinted in, Micromechanics and MEMS, Classic and Seminal Papers to 1990, by William Trimmer, page 565.
  30. H.H. Busta, J.F. Detry, A.D. Feinerman and J.G. Black, “Novel Device Applications Employing LPCVD Tungsten,” Tungsten and Other Refractory Metals for VLSI Applications, ed. by R.S. Blewer, Materials Research Society, Pittsburgh, pp. 283­295, 1986.

Notable Honors

2011, Clean Energy Trust Business Concept Award, Clean Energy Trust

2011, CTSI Defense Energy Challenge Winner, CTSI Defense Energy

Education

Ph.D. Physics
Northwestern University, 1987

M.Sc. Physics
Northwestern University, 1983

B.Sc. Engineering Physics
Cornell University, 1978